CMUTs overview

CMUTs are...

Capacative Micromachined Ultrasonic Transducers (CMUTs) are tiny devices that can send and receive ultrasound signals. We make them here, at NC State, and we use them in many new and exciting ways!

  • Standard IC fabrication processes
  • Submicron gap –>  High E-field intensity –>  Improved sensitivity
  • Broad operating frequency & wide bandwidth  –> Improved resolution
  • Potential for integration with electronic circuits
  • Patterning by simple lithography –>  Easy fabrication of 1-D & 2-D arrays

How we make them – Process flow

How they look in real life